Inventors:
Steven W. Meeks - Fremont CA, US
Mahendra Prabhu Ramachandran - Palo Alto CA, US
Alireza Shahdoost Moghadam - San Jose CA, US
International Classification:
G01N 21/00
Abstract:
In one embodiment, a system to inspect a surface comprises an assembly to direct a first radiation beam onto a surface in a first plane of incidence, a first detector to generate a first signal from a portion of the radiation reflected from the first radiation beam, a first spatial filter interposed between the surface and the first detector, a first ellipsoidal mirror to collect scattered light, a second detector to generate a second signal from the scattered portion of the beam, and a processor to generate, from the first and second signals, a data set representing one or more characteristics of the surface using the first and second signals.