Inventors:
Craig R. Heden - Pacifica CA, US
Albert R. DePetrillo - Folsom CA, US
Robert M. McGuire - Aptos CA, US
Assignee:
Ronal Systems Corporation - Morgan Hill CA
International Classification:
H01L 21/302
H01L 21/461
H01L 21/20
H01L 21/36
B01J 10/00
US Classification:
438710, 700 1, 700 9, 700 11, 700 12, 700 17, 700 18, 700 19, 700 20, 700 23, 700 28, 700 90, 700108, 700117, 700121, 700123, 700266, 700268, 700275, 422129, 438478, 438479, 438480, 438689, 438706
Abstract:
A host and ancillary tool interface methodology for distributed processing is described. The host tool manages a process, except for the generation of a product used in the process. To generate the product, the host tool provides an indication to an ancillary tool that the product is to be generated, and the ancillary tool generates the product after detection of the indication with no further intervention by the host tool. To provide the indication, the host tool preferably activates a control line whose voltage is monitored by the ancillary tool, or alternatively, sets one or more bits in a memory which is periodically checked by the ancillary tool.