US Patent:
20060269656, Nov 30, 2006
Inventors:
Michael Boroson - Rochester NY, US
Anatole Pleten - Brockport NY, US
Steven Van Slyke - Pittsford NY, US
Terrence O'Toole - Webster NY, US
International Classification:
B05D 5/12
C23C 16/00
Abstract:
A method of vaporizing organic material for deposition of an organic layer on a substrate for use in making an OLED device includes providing a first vacuum chamber, vaporizing gettering material to coat a surface which is in or to be placed in the first vacuum chamber or in a second vacuum chamber, and vaporizing the organic material to deposit vaporized organic material on the substrate and leaving the substrate in the first chamber or moving it to the second chamber, whereby the gettering material reacts with contaminants to lessen incorporation of contaminants into the OLED device.