Inventors:
Alfred Snowman - Englewood NJ
Holger Koenigsmann - Valley Cottage NY
Andre Desert - Spring Valley NY
Thomas J. Hunt - Peekskill NY
Assignee:
Praxair S.T. Technology, Inc. - Danbury CT
International Classification:
H01F 100
C23C 1434
Abstract:
The present invention provides a high purity cobalt sputter target having a single phase h. c. p. structure and a magnetic permeability less than the intrinsic magnetic permeability of the material. Substantially pure cobalt is cast and slowly cooled, such as at a rate of 15. degree. C. /min. Or less, to form a cast target of single phase h. c. p. crystallographic structure. This cast target is hot worked at a temperature of at least about 1000. degree. C. to impart a strain of about 65% or greater into the cobalt material, followed by a slow, controlled cooling to room temperature, such as at a rate of 15. degree. C. /min. or less, to maintain the single phase h. c. p. crystallographic structure. The cooled target is then cold worked at substantially room temperature to impart a strain of about 5-20%. The sputter target of the present invention processed by this method has a magnetic permeability of less than about 9, grain sizes in the size range of about 70-160. mu.