Inventors:
Ana R. Londergan - Santa Clara CA, US
Bangalore R. Natarajan - Cupertino CA, US
Evgeni Gousev - Saratoga CA, US
James Randolph Webster - San Jose CA, US
David Heald - Solvang CA, US
Assignee:
Qualcomm Mems Technologies, Inc - San Diego CA
International Classification:
G02F 1/00
Abstract:
Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.