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Barry Saville

from Ballston Spa, NY
Age ~54
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Related to:
Andrew Saville, 29Katherine Saville
Connected to:
Blake A Saville, 32Dustinthomas Saville, 30Herschell H Saville, 94Jeremiah J Saville, 44Kayla Saville, 34Pat J Saville, 69Stanley W Saville, 96Tisha K Saville, 53Vickie L Saville, 66Blanca L Savillon, 73

Barry Saville Phones & Addresses

  • 13 Pheasant Run, Ballston Spa, NY 12020 (518) 288-3473
  • Gansevoort, NY
  • Saratoga Springs, NY

Publications

Us Patents

Design Based Device Risk Assessment

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US Patent:
20120216169, Aug 23, 2012
Filed:
Feb 17, 2012
Appl. No.:
13/399805
Inventors:
Allen Park - San Jose CA, US
Youseung Jin - Hwasung-City, KR
SungChan Cho - Hwasung-Si, KR
Barry Saville - Gansevoort NY, US
Assignee:
KLA-TENCOR CORPORATION - Milpitas CA
International Classification:
G06F 17/50
US Classification:
716136
Abstract:
The present invention includes defining a multiple patterns of interest utilizing design data of the device; generating a design based classification database, the DBC database including design data associated with each of the POIs; receiving one or more inspection results; comparing the inspection results to each of the plurality of POIs in order to identify an occurrence of at least one of the POIs in the inspection results; determining yield impact of each POI utilizing process yield data; monitoring a frequency of occurrence of each of the POIs and the criticality of the POIs in order to identify process excursions of the device; and determining a device risk level by calculating a normalized polygon frequency for the device utilizing a frequency of occurrence for each of the critical polygons and a criticality for each of the critical polygons, the critical polygons defined utilizing design data of the device.
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Barry Saville from Ballston Spa, NY, age ~54 Get Report