Resumes
Resumes
Eric Maiken Phones & Addresses
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Poulsbo, WA
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630 Park View Dr, Santa Clara, CA 95054
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10458 Lockwood Dr, Cupertino, CA 95014 (408) 255-3171
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19811 Bothell Everett Hwy, Bothell, WA 98012
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Austin, TX
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Woodinville, WA
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Reno, NV
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10458B Lockwood Dr, Cupertino, CA 95014 (408) 489-9300
Work
Position:
Service Occupations
Education
Degree:
High school graduate or higher
Emails
Publications
Us Patents
Method Of Monitoring Thin-Film Processes And Metrology Tool Thereof
View pageUS Patent:
6594025, Jul 15, 2003
Filed:
Jul 12, 2001
Appl. No.:
09/905749
Inventors:
Abdul Rahim Forouhi - Cupertino CA
Dale A. Harrison - Tracy CA
Eric Maiken - Santa Clara CA
John C. Lam - San Jose CA
Dale A. Harrison - Tracy CA
Eric Maiken - Santa Clara CA
John C. Lam - San Jose CA
Assignee:
NK Technology. Inc. - Santa Clara CA
International Classification:
G01B 1128
US Classification:
356630, 356382, 356503, 356504
Abstract:
The present invention provides a method for monitoring a modifying-process taking place in a thin-film sample and thereby characterizing the sample thus modified, wherein the modifying-process is performed for purpose of improving physical properties of the sample. The present invention further provides a monitoring tool for characterizing various thin-film processes. Advantages of the method of the present invention are manifest in its non-intrusive nature, fast (or real-time) response, robust sensitivity, and versatility in a variety of thin-film processes. Another inherent advantage of the present invention is that an assortment of the ânkâ parameters can be obtained by using only measurement tool, in contrast to two (or more) simultaneous measurement tools used in the prior art.