Inventors:
Roger Allen Olson - Amery WI
Frederick William Kopitzke - Indianapolis IN
Joseph Patrick O'Connor - Carmel IN
Assignee:
Specialty Coating Systems, Inc. - Indianapolis IN
International Classification:
C23C 1600
Abstract:
Continuous vapor deposition apparatus for coating objects with a coating material, e. g. , parylene, are disclosed. The apparatus comprise an entrance chamber for loading the objects, a process chamber for coating the objects, and an exit chamber for removing the objects. Coating material is introduced into the process chamber under vacuum conditions in a vaporized state. The pressure in the process chamber can be controlled by modulating the rate of introduction of the coating material with a modulating valve in response to the pressure in the process chamber. A process for continuously coating objects by vapor deposition under vacuum conditions, suitable for use in the apparatus, is also disclosed.