Hirokazu Tamura

6812055, Nov 2, 2004

Dec 18, 2003

10/739711

Hirokazu Tamura - Wellesley MA
Matthew J. Neal - Marlborough MA
Alan L. Sidman - Wellesley MA

Advanced Microsensors - Shrewsbury MA
Furukawa America, Inc. - Clinton NJ

H01L 2100

438 48, 310166, 369119, 257 52, 257254, 257415, 257419

Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound.

6856749, Feb 15, 2005

Oct 10, 2002

10/268428

Michikazu Kosuge - Tokyo, JP
Hirokazu Tamura - Wellesley MA, US

Fitel Technologies, Inc. - Clinton NJ

G02B006/00

385137, 385 33, 385 88

An optical device, such as optical coupling devices, optical switches, optical isolators, optical attenuators, laser diodes, photo diodes are provided having a substrate with a groove in order to locate a optical fiber. A lens, such as a graded index lens, is secured to the end of the optical fiber, with the lens located outside the groove, thereby avoiding difficulties with axial alignment of the lens caused by the interface of the optical fiber to the lens. In one implementation, the groove in the prototype is a V-groove, thereby providing stable positioning of the optical fiber within the groove.

6900510, May 31, 2005

Dec 4, 2002

10/309964

Hirokazu Tamura - Wellesley MA, US
Matthew J. Neal - Marlborough MA, US
Alan L. Sidman - Wellesley MA, US
Jiang Zhe - Shrewsbury MA, US

Advanced Microsensors - Shrewsbury MA
Furukawa America, Inc. - Clinton NJ

H01L029/82

257421, 257 52, 257254, 257415, 257419, 369119, 438 73

A Microelectromechanical (MEMS) device and method of fabrication that can minimize derailing of an actuable element of the MEMS device during fabrication can include a MEMS actuator to selectively generate displacement forces to displace an actuable element along a path between sidewalls of a channel. The sidewalls can have stops formed therein that can interact with surfaces on the actuable element to limit displacement of the actuable element during fabrication. One of the sidewalls can be indented to form the stops and the actuable element can have an arm portion that extends between the stops. The sidewalls can be offset to form the stops on spaced apart faces on opposite sides of the channel and the actuable element can be offset between the spaced apart faces to form offset faces in an opposing relationship with the spaced apart faces on the sidewalls. In addition, the actuable element and the sidewalls may be so shaped as to maintain a generally constant width between them.

20030156451, Aug 21, 2003

Feb 21, 2002

10/079985

Hirokazu Tamura - Wellesley MA, US
Matthew Neal - Marlborough MA, US
Alan Sidman - Wellesley MA, US

Fitel Technologies, Inc.

H02K001/00

365/179000, 310/179000

Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound.