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James S Akutsu

from Vancouver, WA
Age ~51
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Also known as:
James M Akutsu, James U
Phone and address:
16321 NE 70Th Cir, Vancouver, WA 98682
(360) 713-2794
Related to:
Paul Carter, 62Marsha Hardee, 75Sean Carter, 36Barbaraa LaxsonLinda Akutsu
Connected to:
Kwadwo Akwabi-Ameyaw, 39Francis Akwaboah, 53Okey A Akwanemnye, 51Mertie Akwani, 68Uchenna U Akwarandu, 60Onye E Akwari, 82Stephen Akwari, 42Regina Akwawua, 72Jordan Akwenuke, 31Patricia T Akwetey, 43

James Akutsu Phones & Addresses

  • 16321 NE 70Th Cir, Vancouver, WA 98682 (360) 713-2794
  • Westwood, MA
  • 92 Neponset St, Canton, MA 02021 (781) 828-7933
  • Norwood, MA
  • Gainesville, GA
  • Athens, GA
  • Oakwood, GA

Publications

Us Patents

Method And System For Analyzing And Tracking Defects Among A Plurality Of Substrates Such As Silicon Wafers

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US Patent:
20040252879, Dec 16, 2004
Filed:
Jun 10, 2004
Appl. No.:
10/864963
Inventors:
Timothy Tiemeyer - Randolph MA, US
James Akutsu - Norwood MA, US
Assignee:
ADE Corporation
International Classification:
G06K009/00
G01N021/00
US Classification:
382/145000, 356/237400
Abstract:
A population of data points each having three or more parameters associated therewith, such as multi-channel defect data from an optical scanner, are plotted in three dimensions, and groupings of data points are identified. Boundary surfaces are defined in the three-dimensional space for delineating groupings of data points. The different groupings correspond to different data classifications or types. Classification algorithms based on the boundary surfaces are defined. When applied to defect classification, the algorithms can be exported to an optical scanner for runtime classification of defects. An algorithm for identifying a particular grouping of data points can be defined as a Boolean combination of grouping rules from two or more different n-dimensional representations, where n can be either 2 or 3 for each representation.

Method And System For Classifying Defects Occurring At A Surface Of A Substrate Using Graphical Representation Of Multi-Channel Data

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US Patent:
20040258295, Dec 23, 2004
Filed:
Jun 10, 2004
Appl. No.:
10/864962
Inventors:
Timothy Tiemeyer - Randolph MA, US
James Akutsu - Norwood MA, US
Robert Salter - St. Albans VT, US
Yu Zeng - Millis MA, US
Assignee:
ADE Corporation
International Classification:
G06K009/00
US Classification:
382/145000
Abstract:
A population of data points each having three or more parameters associated therewith, such as multi-channel defect data from an optical scanner, are plotted in three dimensions, and groupings of data points are identified. Boundary surfaces are defined in the three-dimensional space for delineating groupings of data points. The different groupings correspond to different data classifications or types. Classification algorithms based on the boundary surfaces are defined. When applied to defect classification, the algorithms can be exported to an optical scanner for runtime classification of defects. An algorithm for identifying a particular grouping of data points can be defined as a Boolean combination of grouping rules from two or more different n-dimensional representations, where n can be either 2 or 3 for each representation.

System And Method For Inspecting A Workpiece Surface Using Surface Structure Spatial Frequencies

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US Patent:
20060197945, Sep 7, 2006
Filed:
Dec 17, 2005
Appl. No.:
11/311926
Inventors:
Thimothy Tiemeyer - Providence RI, US
James Akutsu - Vancouver WA, US
International Classification:
G01N 21/88
US Classification:
356237200
Abstract:
A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising light that is scattered from the surface upon impingement thereon by the incident beam; and determining an extent of a contribution to surface roughness from a component of the surface, with the component having a surface roughness spatial frequency range.
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James S Akutsu from Vancouver, WA, age ~51 Get Report