Inventors:
Jong H. Han - Pataskala OH, US
M. Taher A. Saif - Champaign IL, US
Michael D. Uchic - Dayton OH, US
Assignee:
The Board of Trustees of the University of Illinois - Urbana IL
International Classification:
G01D 1/16
G01L 7/00
Abstract:
Methods and apparatus for testing a microscale or nanoscale sample. A testing stage comprises a frame having first and second laterally opposing ends and first and second side beams. At least one deformable force sensor beam is disposed near the first opposing end and extends laterally between the first and second side beams. A first longitudinal beam, having a free end, bisects the at least one force sensor beam, and a second longitudinal beam has a free end facing the free end of the first longitudinal beam to define a gap therebetween. A support structure comprises a plurality of laterally extending beams disposed such that the second longitudinal beam bisects the plurality of laterally extending beams. Each of a pair of slots disposed at each of the free ends of the first and second longitudinal beams comprises a tapered portion leading to a generally longitudinal portion aligned with the central longitudinal beam. The slots provide a seat for a dogbone-shaped sample.