US Patent:
20210366738, Nov 25, 2021
Inventors:
- Villach, AT
David MUI - Fremont CA, US
Karl-Heinz HOHENWARTER - Dellach/Gail, AT
Butch BERNEY - Pleasanton CA, US
Nathan LAVDOVSKY - Beaverton OR, US
Christian PUTZI - Rosenbach, AT
Hongbo SI - Santa Clara CA, US
Robert JOHNSON - San Jose CA, US
Michael KLEMM - Villach, AT
Bernhard LOIDL - Villach, AT
International Classification:
H01L 21/67
H01L 21/687
Abstract:
A vapor delivery head for wet treatment of a substrate includes a body including an upper surface, a lower surface, an upper plenum and a lower plenum. A first bore is arranged on the upper surface of the body and fluidly connected to the upper plenum to supply heated fluid. A second bore is arranged on the upper surface of the body and connected to the upper plenum to remove heated fluid. A third bore is arranged on the upper surface of the body and connected to the lower plenum to receive a gas mixture. A plurality of through holes through the lower surface of the body are in fluid communication with the lower plenum.